Ultrafast laser processing system combined with F-theta beam shaping and homogenization, enabling non-destructive ablation of oxide and passivation films

Customizable square beam spot sizes tailored to specific process requirements

Fine-pattern control technology ensures precise separation between P/N regions

In-house developed high-precision vision algorithms for accurate alignment

High throughput, high precision, high uniformity, and high stability

Multiple in-line inspection functions to ensure superior product yield

Modular design with strong compatibility and customizable configurations